確かな技術に基づいたフィルタメーカー
確かな技術に基づいたフィルタメーカー
The Powder Trap HT series is a filter that captures reaction products exhausted mainly from semiconductor and liquid crystal manufacturing equipment (ion implantation, CVD, etching process).
The trap function in front of the filter and the pleated cartridge with a large capture area with electroplating effect enable low pressure loss and long life.
Promotes the growth of reaction products.
It uses a pleated cartridge with a large capture area.
The pleated cartridge results in low pressure loss.
The cartridge uses electrochemically treated filter material to capture even fine powder.
It can be installed on the vacuum line or exhaust line of a dry pump.
| Model | External dimensions | Connection fittings | weight | Maximum specified pressure | Relief valve operating pressure | Body Material |
|---|---|---|---|---|---|---|
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